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Conferences > NLO > 2015 > NTu3A > NTu3A.6

Second harmonic generation from CMOS compatible suboxide amorphous thin films grown by sputtering

Kenji Imakita, Ibuki Kawamura, and Minoru Fujii

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Abstract

Strong second harmonic generation (SHG) was observed from amorphous Ge doped SiO2 and Si rich SiO2 thin films. The observed maximum value of d33 was 8.2 pm/V, which is 4 times larger than d22 of β-BaB2O4 crystal.

© 2015 Optical Society of America

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