On optimal sampling, minimizing measuring time, in point-by-point surface metrology

Sergio Barbero; Manuel Ritoré

doi:10.1364/MATH.2019.MM2D.5

Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)
OSA Technical Digest (Optica Publishing Group, 2019),
paper MM2D.5
•https://doi.org/10.1364/MATH.2019.MM2D.5

On optimal sampling, minimizing measuring time, in point-by-point surface metrology

Sergio Barbero and Manuel Ritoré

Mathematics in Imaging 2019

Munich Germany
24–27 June 2019
ISBN: 978-1-943580-63-7

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Multi-Dimensional Imaging (MM2D)

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S. Barbero and M. Ritoré, "On optimal sampling, minimizing measuring time, in point-by-point surface metrology," in Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP), OSA Technical Digest (Optica Publishing Group, 2019), paper MM2D.5.

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Abstract

A relevant problem in point-by-point surface metrology is to find the set of points minimizing the overall measurement time. We show, through mathematical arguments, that selecting the sampling points along circle involutes is a good choice.

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