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OCMM Displacement Measuring Interferometer Probe with 3DoF Measurement

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Abstract

We present a 3DoF optical probe for measuring freeform optics with an optical coordinate measuring machine (OCMM), with the goal of investigating point-to-point measurement and establishing a probing methodology for self-alignment to the optical surface. Design and benchtop validation is presented.

© 2015 Optical Society of America

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