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Temperature Dependence of Nanoscale Si3N4 Tuning Fork Cavity Optomechanical Transducers

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Abstract

We investigate the temperature dependence of doubly clamped Si3N4 tuning fork cavity optomechanical transducers. The temperature-induced mechanical resonance shift was experimentally measured and investigated by both numerical and analytical modeling.

© 2017 Optical Society of America

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