Time-resolved study of femtosecond laser-induced plasma on silicon

Zhandong Chen; Qiang Wu; Ming Yang; Jingjun Xu

doi:10.1364/LS.2013.LTh1I.5

Frontiers in Optics 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper LTh1I.5
•https://doi.org/10.1364/LS.2013.LTh1I.5

Time-resolved study of femtosecond laser-induced plasma on silicon

Zhandong Chen, Qiang Wu, Ming Yang, and Jingjun Xu

Laser Science 2013

Orlando, Florida United States
6–10 October 2013
ISBN: 978-1-55752-987-9

From the session
Attosecond Science at the Energy Frontier (LTh1I)

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Z. Chen, Q. Wu, M. Yang, and J. Xu, "Time-resolved study of femtosecond laser-induced plasma on silicon," in Frontiers in Optics 2013, P. Delyett, Jr. and D. Gauthier, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper LTh1I.5.

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Abstract

Generation and evolution of femtosecond laser-induced plasma on silicon were studied in various ambient gases by steady-state and time-resolved spectroscopy. This leads to a better understanding of the laser ablation and microsturctures formation on silicon surface.

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