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Experimental and theoretical investigation of the early stage of laser induced plasma produced by the interaction between a KrF excimer laser and a metallic titanium target.

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Abstract

The interaction of laser beam with solid matter and the consequent plasma generation has been studied for many years [1]. Nevertheless the great efforts to exploit the laser matter interaction for material processing and diagnostic purposes, many aspects still need to be elucidated and clarified. In particular the plasma induced by ultraviolet and visible nanosecond laser is successfully employed for thin film deposition of a wide range of classical and novel materials (PLD) [2] and for in situ qualitative elemental analysis (LIBS) [3].

© 2002 Optical Society of America

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