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Conferences > LAOP > 2014 > LM4A > LM4A.44

A novel deep-UV polymer for integrated photonics: from waveguides structures to taper-waveguides coupled to cascade of multistage resonators used as thermal sensors

R. Castro-Beltran, N. Huby, D. Pluchon, D. Duval, M. Specht, H. Lhermite, G Loas, L Camberlein, E Gaviot, and B. Bêche

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Abstract

An overview of current research on integrated photonics based on the new UV210 photoresist is given. We report the overall design, fabrication and characterization of waveguides structures, multistage microresonators and their potential as thermal sensors.

© 2014 Optical Society of America

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