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Trace Humidity Sensor based on Quartz-Enhanced Photoacoustic Spectroscopy

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Abstract

A compact trace humidity sensor based on quartz enhanced photoacoustic spectroscopy (QEPAS) technique was designed and characterized. A sensitivity of 2.5×10−9 cm−1W/Hz½ was achieved. An influence of oxygen presence on the detected signal was observed.

© 2006 Optical Society of America

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