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Diode Laser-based Photoacoustic Detection Using a Micromechanical Cantilever Transducer

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Abstract

A novel sensitive approach to detect weak pressure variations has been applied to diode laser-based photoacoustic spectroscopy. In the transducer a compact Michelson interferometer is used to measure the deflections of a micromechanical silicon cantilever.

© 2006 Optical Society of America

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