Abstract

The effects of the periodical ripples to the sub-micron meter laser machining with linear polarization is to deteriorate the machining performance [1], however, it works rather beneficial to form trenches of ~100nm width by scanning the laser beam in perpendicular to the laser polarization. In the present work we investigate the effect of the ripple formation associated with the sub-micron machining by the Bessel beam on the micromachining performance with the fluence lower than the ablation threshold and various polarization.

© 2015 Japan Society of Applied Physics, Optical Society of America