Abstract

An inspection of mechanically damaged areas on manufactured parts is necessary to produce high-quality products. A scanning probe on the object is necessary for a conventional surface inspection system, which is time-consuming. We have been studying optical surface defect detection with large field of view and high speed. Especially, we used porous surfaces such as a carbon blade as an inspection object. The carbon blade is used in the rotary pump. However, it is difficult to detect defects on porous surfaces using optical method due to roughness of the surfaces.

© 2014 Japan Society of Applied Physics, Optical Society of America