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Optical metrology of an isolated crystalline zinc oxide microsphere on a gold substrate

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Abstract

We try to use an efficient and accuracy method to describe optical scattering from an isolated crystalline zinc oxide (ZnO) microsphere on a gold substrate. The calculated three-dimensional (3D) microscopic ellipsometry imaging pictures with nanoscale resolution are present. We calculate the Ψ and △ spectra for specular reflections for the specific frequency.

© 2013 Japan Society of Applied Physics, Optical Society of America

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