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Study on the work function of GeTe/Sb2Te3 superlattice-like films for application of phase change memory

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Abstract

We prepared GeTe/Sb2Te3 superlattice-like (SLL) structure phase change films and got better phase change performance than GeTe. Experiments confirmed the contrast of work function (WF) between SLL and conventional materials.

© 2017 Optical Society of America

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