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Conferences > ISOM_ODS > 2005 > WP > WP10

Super-Resolution Near-field Structure with Nanocomposite Mask Layer prepared by Co-Sputtering method

Wei-Chih Hsu, Min-Jen Deng, Mei-Rurng Tseng, Song-Yeu Tsai, and Chum-Sam Hong

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Abstract

The Readout properties and TEM microstructures of super-resolution near-field structure (Super-RENS) with nanocomposite mask layer (nanoparticles and nanorod) prepared by co-sputtering method were studied and demonstrated. The CNR of 100nm mark length is 40dB, which is measured by 635nm wavelength and 0.6 NA.

© 2005 Optical Society of America

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