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Conferences > ISOM_ODS > 2005 > WA > WA5

Thermal Direct Mastering Technique using a Deep UV Laser

Michinobu Mieda, Masanori Shimo, Ikuo Nakano, Toshihiko Sakai, Junji Hirokane, Kunio Kojima, and Akira Takahashi

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Abstract

The new mastering technique, which directly formed patterns in an organic material by utilizing heat, was developed. By using this mastering technique, high-density ROM patterns with a recording capacity of 100 GB in a disc of 120 mm diameter could be mastered applying a deep UV laser.

© 2005 Optical Society of America

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