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  • Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP)
  • OSA Technical Digest (Optica Publishing Group, 2018),
  • paper JM4A.16
  • https://doi.org/10.1364/3D.2018.JM4A.16

Sub-surface Thermal Imaging of Microelectronic Devices using Confocal Laser Scanning Thermoreflectance Microscopy

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Abstract

We report on a confocal thermoreflectance imaging system, which provides the elimination of out-of-focus reflections, and demonstrate the improvement of ~23 times in the sensitivity due to the confocality during the sub-surface thermoreflectance measurement.

© 2018 The Author(s)

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