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Novel MEMS Deformable Mirror for Focus Control and Aberration Correction

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Abstract

Electrostatically actuated MEMS mirrors for focus control have been fabricated. Deflection over 7.3 µm, which corresponds to 67% of the air gap and a focal length of 154 mm, has been achieved using closed-loop control. Low-order aberrations have been corrected and the devices have been utilized in a simple imaging system.

© 2010 Optical Society of America

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