Abstract
We present a high resolution extreme ultraviolet patterning approach based on Talbot self imaging and holographic projection imaging using for illumination a table top extreme ultraviolet laser.
© 2009 Optical Society of America
PDF ArticleMore Like This
L. Urbanski, P. Wachulak, A. Isoyan, F. Jiang, Y. Cheng, J. J. Rocca, C. S. Menoni, M. C. Marconi, and F. Cerrina
FTuS2 Frontiers in Optics (FiO) 2009
W. Li, V. Martinez-Esquiroz, L. Urbanski, D. Patel, C. S. Menoni, M. C. Marconi, and A. Stein
FTh2F.3 Frontiers in Optics (FiO) 2013
Elisabeth R. Shanblatt, Bosheng Zhang, Dennis F. Gardner, Matthew D. Seaberg, Christina L. Porter, Robert M. Karl, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams
CW4E.4 Computational Optical Sensing and Imaging (COSI) 2015