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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper JFA7
  • https://doi.org/10.1364/CLEO.2009.JFA7

Coherent imaging nano-patterning with extreme ultraviolet laser illumination

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Abstract

We present a high resolution extreme ultraviolet patterning approach based on Talbot self imaging and holographic projection imaging using for illumination a table top extreme ultraviolet laser.

© 2009 Optical Society of America

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