Abstract

We present an experiment where the motion of a silicon micro-mechanical resonator is optically monitored with a very high-finesse optical cavity (F = 30000), down to a quantum-limited sensitivity at the 10⁻¹⁹ m/√Hz level. We have observed the thermal noise of the resonator at room temperature over a wide frequency range, and fully characterized its optomechanical behaviour, in good agreement with theoretical models.

© 2007 IEEE