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Optica Publishing Group
  • International Quantum Electronics Conference
  • 1996 OSA Technical Digest Series (Optica Publishing Group, 1996),
  • paper FD2

Surface second harmonic generation from Si/SiO2 and GaAs using 10 fs pulses

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Abstract

Surface second harmonic generation (SSHG) is powerful tool for studying surfaces of centrosymmetric materials where bulk SHG is dipole forbidden [1], The Si-SiO2 interface is of particular interest because of its critical role in integrated circuits, SSHG has been used to study surface steps [2], straining of subsurface bonds [3] and surface roughness [4]. Early experiments using nanosecond pulses were actually limited by the laser induced damage to the surfaces, which has resulted in the use of ps [3] and 100 fs [2,4] pulses to obtain good signal to noise with lower average powers (hundreds of milliwatts for 100 fs pulses).

© 1996 Optical Society of America

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