Abstract

Second-harmonic generation spectroscopy is a promising technique for buried interfaces. It possesses the long penetration depths characteristic of most optical methods, and intrinsic interface sensitivity characteristic of second-order optical processes. Recently it has been used with considerable success to probe solid/solid interfaces.¹ Investigations of buried metal-semiconductor interfaces are of great fundamental and practical importance. They have been studied by many other experimental methods over years.² However, traditional surface, optical, and current-voltage diagnostics have limitations, and there is always a need for complementary methods.

© 1994 Optical Society of America