Hybrid integration of tantalum pentoxide microresonators on silicon-on-insulator

Philippe Jean; Alexandre Douaud; Sophie LaRochelle; Younès Messaddeq; Wei Shi

doi:10.1364/IPRSN.2021.ITu2B.4

OSA Advanced Photonics Congress 2021
OSA Technical Digest (Optica Publishing Group, 2021),
paper ITu2B.4
•https://doi.org/10.1364/IPRSN.2021.ITu2B.4

Hybrid integration of tantalum pentoxide microresonators on silicon-on-insulator

Philippe Jean, Alexandre Douaud, Sophie LaRochelle, Younès Messaddeq, and Wei Shi

Integrated Photonics Research, Silicon and Nanophotonics 2021

Washington, DC United States
26–29 July 2021
ISBN: 978-1-943580-94-1

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Microresonators and Frequency Combs (ITu2B)

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P. Jean, A. Douaud, S. LaRochelle, Y. Messaddeq, and W. Shi, "Hybrid integration of tantalum pentoxide microresonators on silicon-on-insulator," in OSA Advanced Photonics Congress 2021, B. Yang, F. Leo, A. Tauke-Pedretti, S. Arafin, M. Clerici, L. Caspani, L. Busse, M. Kats, J. Fan, W. Ming (Steve) Lee, D. Caplan, N. Parsons, W. Freude, C. Tremblay, D. Hillerkuss, K. Igarashi, H. Elgala, N. Guerrero Gonzalez, R. "Patty" Stabile, K. Jaeger, R. Saive, H. Aziz, and H. Tan, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper ITu2B.4.

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Abstract

We report co-integration of tantalum pentoxide microresonators with silicon- on-insulator waveguides using a micro-trench filling method. The devices exhibit near critical coupling (ER > 20 dB) and low thermally induced resonance shift below 5 pm/K.

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