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A Micro-Opto-Electro-Mechanical Grating 1D-OPA

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Abstract

We propose a 1D optical phased array (OPA) utilizing near-field micro-opto-electro- mechanical interaction to tune a waveguide grating’s diffraction angle. Simulations demonstrate steering angles >20 (material, geometry, wavelength, and polarization-dependent). Measurements validate the proposed OPA concept.

© 2021 The Author(s)

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