We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.
© 2018 The Author(s)
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription