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Epitaxial Barium Titanate Thin Films for Mid-infrared Photonic Circuits

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Abstract

Mid-Infrared photonic circuits using epitaxial barium titanate thin films are demonstrated through complementary metal–oxide–semiconductor process. The c-axis oriented BTO films are transparent between λ=2.5-7 um and a sharp fundamental mode is observed.

© 2017 Optical Society of America

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