SOI-based Tunable Microring Resonator using Microelectromechanical Cantilevers

Hossam Shoman; Kenaish Al Qubaisi; Paulo Moreira; Clara Dimas; Anatol Khilo; Marcus S. Dahlem

doi:10.1364/IPRSN.2016.ITu1B.2

Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF)
OSA technical Digest (online) (Optica Publishing Group, 2016),
paper ITu1B.2
•https://doi.org/10.1364/IPRSN.2016.ITu1B.2

SOI-based Tunable Microring Resonator using Microelectromechanical Cantilevers

Hossam Shoman, Kenaish Al Qubaisi, Paulo Moreira, Clara Dimas, Anatol Khilo, and Marcus S. Dahlem

Integrated Photonics Research, Silicon and Nanophotonics 2016

Vancouver Canada
18–20 July 2016
ISBN: 978-1-943580-14-9

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Silicon Photonics I (ITu1B)

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H. Shoman, K. A. Qubaisi, P. Moreira, C. Dimas, A. Khilo, and M. S. Dahlem, "SOI-based Tunable Microring Resonator using Microelectromechanical Cantilevers," in Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF), OSA technical Digest (online) (Optica Publishing Group, 2016), paper ITu1B.2.

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Abstract

A new configuration of a tunable microring resonator using microelectrome-chanical silicon cantilevers for evanescent field perturbation, with electrostatic actuation, is demonstrated. A resonant wavelength shift of 0.4 nm is measured around 1558 nm.

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