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Measurements of Effective Refractive Index of SOI Waveguides using Interferometers

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Abstract

We demonstrate an accurate method of measuring the effective refractive index of SOI waveguides in the C-band using three Mach-Zehnder Interferometers. Over wafer the average extraction error of effective index and group index is 0.003 and 0.004.

© 2015 Optical Society of America

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Grating coupled low loss Ge-on-Si waveguides and multimode interferometers for the mid-infrared

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