Abstract

We demonstrate the fabrication of a low loss broadband vertical coupler for use in the 3D integration of Si3N4 based planar waveguides. Coupling loss of 0.2 dB was achieved and interaction between layers investigated.

© 2013 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription