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Conferences > IPR > 2004 > IThG > IThG5

Self-aligned total internal reflection mirrors with very low loss

Doo Gun Kim, Cem Ozturk, Jae Hyuk Shin, Jong Chang Yi, and Nadir Dagli

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Abstract

We designed, fabricated and characterized total internal reflection mirrors on InGaAsP/InP using a self aligned process with two etch steps. Experimental results show that additional loss per mirror is 0.71± 0.06 dB.

© 2004 Optical Society of America

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