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Conferences > IPR > 2003 > ITuC > ITuC1

Monolithic integration of optical waveguides and micromechanical switching in silicon-on-insulator

Howard R. Stuart, Frieder H. Baumann, and Annjoe Wong-Foy

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Abstract

We describe a 1×2 micromechanical optical waveguide switch fabricated entirely within SOI. A suspended cantilever beam acting as a single mode silicon ridge waveguide is electrostatically actuated to enable switching between two output waveguides.

© 2003 Optical Society of America

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