Widely Tunable Micromachined Optical Filters

M. S. Wu; E. C. Vail; C. J. Chang-Hasnain

doi:10.1364/IPR.1996.IWG5

Integrated Photonics Research
1996 OSA Technical Digest Series (Optica Publishing Group, 1996),
paper IWG5
•https://doi.org/10.1364/IPR.1996.IWG5

Widely Tunable Micromachined Optical Filters

M. S. Wu, E. C. Vail, and C. J. Chang-Hasnain

Integrated Photonics Research 1996

Boston, Massachusetts United States
ISBN: 1-55752-439-4

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Integrated Optics and Micromachining (IWG)

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M. S. Wu, E. C. Vail, and C. J. Chang-Hasnain, "Widely Tunable Micromachined Optical Filters," in Integrated Photonics Research, Vol. 6 of 1996 OSA Technical Digest Series (Optica Publishing Group, 1996), paper IWG5.

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Abstract

We demonstrate a surface-normal GaAs Fabry-Perot filter with 70 nm continuous tuning range requiring 5V tuning voltage. Micromechanical tuning is achieved by electrostatically deflecting the top mirror of the resonator which is freely suspended as a cantilever.

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