Abstract

The demands for optical matrix switch modules are increasing as research on ATM communication switches and optical interconnections progresses. However, the conventional combination lens method¹, i.e. external spot size conversion, has poor reproducibility and is not reliable in the case of array modules such as matrix switches because of strict alignment tolerances. It is, therefore, necessary to relax these tolerances in optical devices using semiconductor tapered waveguides^2-4, i.e. internal spot size converters. Recently, attempts have been made to integrate semiconductor tapered waveguides with several optical devices^5,6.

© 1994 Optical Society of America