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Active silica-based optical waveguides on Si

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Abstract

Silica-based optical waveguides have been developed for the purpose of constructing efficient optical fiber communication systems[1]. The waveguides, which are fabricated by a combination of fiber fabrication and LSI technologies, have the advantages of low loss and a fiber- matched structure. Various kinds of planar lightwave circuit (PLC) have been successfully formed on Si.

© 1993 Optical Society of America

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