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Vertical integration of high-silica channel waveguides on Si

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Abstract

The density of optical functions available on the same substrate and the complexity of the integrated optical circuits conceivable would benefit from the extension of the optical interaction to a third dimension. Recently, vertical integration of Si planar waveguides on Si has been reported1. However, no experimental evidence of vertical integration of channel waveguides has been reported in the literature so far, to our knowledge.

© 1992 Optical Society of America

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