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Conferences > IPNRA > 2009 > IWD > IWD5

Holographic Realization of Two-dimensional Photonic Crystal Structures on Silicon Substrates

Yung-Jr Hung, San-Liang Lee, and Yen-Ting Pan

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Abstract

We successfully realize submicron-scale photonic crystals on silicon substrates with good quality by laser holography technique. The use of antireflection layers is crucial for realizing submicron photonic crystals with good uniformity over a large area.

© 2009 Optical Society of America

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