Abstract

We report the design, fabrication, and characterization of differential waveguide splitters for transduction of microcantilever deflection for sensor applications. Our approach is scalable to permit hundreds to several thousand of microcantilevers on a single chip. Compact silicon-on-insulator rib waveguide splitter networks have been demonstrated and integrated with microcantilever arrays of up to 32 microcantilevers. Microfluidics have also been integrated, and inkjet functionalization methods are being developed to individually functionalize microcantilevers in an array.

© 2009 Optical Society of America