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Design and Fabrication Techniques for a Midinfrared Photonic Crystal Defect Cavity in Indium Antimonide

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Abstract

Simulation results and fabrication details are presented for a two-dimensional AlxGayIn1-x-ySb photonic crystal membrane defect cavity. Peak emission is predicted at λ=3.372µm with a Q factor of 26233 for an optimized membrane thickness of 1000nm.

© 2009 Optical Society of America

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