Abstract
We demonstrate densely folded silicon wire waveguide ring resonator sensors for label-free biosensing. A spiral ring resonator sensor of 30 μm × 30 μm area has a quality factor of over 20,000, and a cavity length equivalent to a ring of a diameter of 130 μm. We show that extended cavity length increases the quality factor and improves the fabrication robustness of resonators. Real time monitoring of molecular binding resolves ~ 0.2% of a protein monolayer.
© 2009 Optical Society of America
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