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Conferences > IPNRA > 2008 > IMD > IMD5

Ultra-high Quality Factor Silicon Nitride Planar Microdisk Resonators for Integrated Photonics in the Visible Range

Ehsan Shah Hosseini, Siva Yegnanarayanan, Mohammad Soltani, and Ali Adibi

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Abstract

Ultra-high-quality (Q>4×10^6) microdisk resonators are demonstrated in a Si3N4 platform at 655nm with integrated in-plane coupling waveguides on a Si substrate. Critical coupling to first-order radial mode is demonstrated using pedestal layer to control coupling.

© 2008 Optical Society of America

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