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Conferences > IPNRA > 2007 > IWA > IWA4
  • Integrated Photonics and Nanophotonics Research and Applications / Slow and Fast Light
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper IWA4
  • •https://doi.org/10.1364/IPNRA.2007.IWA4

Integrated Hollow-Core Waveguides Made by Sputter Deposition

Yue Zhao, Evan J. Lunt, Dongliang Yin, Holger Schmidt, and Aaron R. Hawkins

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Abstract

A new fabrication method for hollow core waveguides based on sputter deposition is demonstrated. Arched-core waveguides were constructed on silicon with a low-temperature sacrificial etching technique that lends itself to high-volume production.

© 2007 Optical Society of America

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