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Conferences > IPNRA > 2007 > ITuE > ITuE5
  • Integrated Photonics and Nanophotonics Research and Applications / Slow and Fast Light
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper ITuE5
  • •https://doi.org/10.1364/IPNRA.2007.ITuE5

Compact Carrier Injection Based Mach-Zehnder Modulator in Silicon

S. J. Spector, M. E. Grein, R. T. Schulein, M. W. Geis, J. U. Yoon, D. M. Lennon, F. Gan, F. X. Kärtner, and T. M. Lyszczarz

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Abstract

CMOS-compatible, PIN diode Mach-Zehnder modulators have been fabricated. The devices operate at 10 GHz with a modulation depth of 25% at an input power of 100 mW. Compensated frequency response is flat to 5 GHz.

© 2007 Optical Society of America

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