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Conferences > IODC > 2010 > IWC > IWC5

Microstructured Optics for Excimer-based Systems: Applications for Imaging, Beam Shaping and Coherence Management

Robert Brunner, Hans Jürgen Dobschal, Reinhard Steiner, Matthias Burkhardt, Matthias Cumme, Oliver Sandfuchs, Dennis Lehr, and Michael Helgert

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Abstract

Imaging DOEs, randomly distributed microlenses and sub-λ-structures allow the improvement of the performance of Excimer-based imaging and illumination systems. The potentials and the challenges are discussed especially with the focus on the local profile.

© 2010 OSA, SPIE

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