Determination of Measurement Uncertainty in the Developed Instantaneous Phase Shifting Interferometer

N.R. Sivakumar; B. Tan; K. Venkatakrishnan

doi:10.1364/IODC.2006.ThA1

International Optical Design
Technical Digest (CD) (Optica Publishing Group, 2006),
paper ThA1
•https://doi.org/10.1364/IODC.2006.ThA1

Determination of Measurement Uncertainty in the Developed Instantaneous Phase Shifting Interferometer

N.R. Sivakumar, B. Tan, and K. Venkatakrishnan

International Optical Design Conference 2006

Vancouver Canada
4–8 June 2006
ISBN: 1-55752-811-X

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Interferometry and Testing (ThA)

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N. R. Sivakumar, B. Tan, and K. Venkatakrishnan, "Determination of Measurement Uncertainty in the Developed Instantaneous Phase Shifting Interferometer," in International Optical Design, Technical Digest (CD) (Optica Publishing Group, 2006), paper ThA1.

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Abstract

In this paper, detection of system noise in the optical layout for instantaneous phase shifting interferometry is discussed. Experiments were carried out on a diamond turned aluminum surface on the developed interferometer and compared with a commercial profiler to ascertain the uncertainty in the developed system.

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