Abstract
Sub-micron single-shot ablation features produced by femtosecond laser pulses have been investigated in silicon-on insulator with atomic force microscopy. The results are fitted with a simple model that includes secondary absorption in the laser-induced plasma.
© 2012 Optical Society of America
PDF ArticleMore Like This
Cyril Hnatovsky, Vladlen G. Shvedov, Natalia Shostka, Andrei V. Rode, and Wieslaw Krolikowski
JTu1K.6 CLEO: Applications and Technology (CLEO:A&T) 2012
A. Villafranca, K. Popov, J-M. Guay, F. Baset, L. Ramunno, and V.R. Bhardwaj
JTh4I.2 CLEO: Applications and Technology (CLEO:A&T) 2012
M. Hashida, S. Masuno, Y. Furukawa, M. Kusaba, S. Inoue, S. Sakabe, H. Sakagami, and M. Tsukamoto
STh3J.3 CLEO: Science and Innovations (CLEO:S&I) 2017