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Conferences > FiO > 2020 > FTu6B > FTu6B.8

Graphene-based Capacitive Structures Fabrication for Optical Modulation Devices

Hilton H. Shimabuko, Jhonattan C. Ramírez, and Lúcia A. M. Saito

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Abstract

This work presents the fabrication processes, for an embedded two CVD-grown single-layer graphene based capacitive structure, with Al2O3 as a thin dielectric layer between them, aiming to act as an active medium for electro-optical modulators.

© 2020 The Author(s)

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