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λ-compact ITO Plasmonic Mach-Zehnder Modulator on Si

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Abstract

We demonstrate an integrated wavelength-compact plasmonic ITO-based Mach-Zehnder electro-optic modulator on Si platform, within a miniscule phase-shifter length of 2.5 µm, featuring a half-wave voltage and active device length product of VπL = 95 V·µm.

© 2020 The Author(s)

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