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Conferences > FiO > 2017 > JTu2A > JTu2A.12

Novel Hard Mask Fabrication Method for Hybrid Plasmonic Waveguide and Metasurfaces

Sajid Choudhury, Vladimir A. Zenin, Soham Saha, Vladimir M. Shalaev, Sergei Bozhevolnyi, and Alexandra Boltasseva

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Abstract

A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

© 2017 Optical Society of America

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