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Fused phase image obtained from frequency comb profilometer and optical interferometer

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Abstract

Phase images obtained in the radio frequency (RF) and optical frequency (OF) ranges, whose difference was about 4 × 105, were combined on the basis of a pattern matching method. RF phase imaging was implemented with an optical frequency comb femtosecond laser and a single-pixel camera to measure a meter-order depth object with micrometer-order accuracy. OF phase imaging was implemented with an optical interferometer using a low-coherence femtosecond laser pulses to measure the profile with nanometer-order accuracy and high spatial resolution.

© 2017 Optical Society of America

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