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Single Chip LIDAR with Discrete Beam Steering by Digital Micromirror Device

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Abstract

MEMS-based beam steering by Digital Micromirror Device illuminated by pulsed laser enables single-chip LIDAR. We demonstrate 48° field of view, 3.4k points/sec scan rate, and <1cm accuracy for 1.2 m distance across five steering angles.

© 2017 Optical Society of America

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