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Conferences > FiO > 2016 > JW4A > JW4A.52

Thermal Imaging Microscope and Applications to Microelectronic Devices

Ki Soo Chang, Dong Uk Kim, Chan Bae Jeong, and Geon Hee Kim

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Abstract

We demonstrate a thermal imaging microscope system that measures the temperature distribution over the surface of microelectronic devices. It enables hot spot detection and thermal analysis of microelectronics devices.

© 2016 Optical Society of America

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